Effect of excimer laser irradiation condition on solid phase crystallization, structure and optical property of Ga<sub>2</sub>O<sub>3</sub> thin films
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- uchida hiroki
- Tokyo Inst. of Tech.
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- Shiojiri Daishi
- Tokyo Inst. of Tech.
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- Fukuda Daiji
- Tokyo Inst. of Tech.
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- Tsuchimine Nobuo
- TOSHIMA Manu.
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- Koyama Koji
- Namiki Precision Jewel
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- Kaneko Satoru
- Tokyo Inst. of Tech. Kanagawa Ind. Tech. Center
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- Matsuda Akifumi
- Tokyo Inst. of Tech.
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- Yoshimoto Mamoru
- Tokyo Inst. of Tech.
Bibliographic Information
- Other Title
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- エキシマレーザー照射による固相結晶化Ga<sub>2</sub>O<sub>3</sub>薄膜における構造及び光学特性への照射条件の影響
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2015.2 (0), 1391-1391, 2015-08-31
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390577298348018304
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC