Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
shirasawa sho and Sueoka Koji and Yamaguchi Tadashi and Maekawa Kazuyoshi,First principles analysis on proximity gettering sites formed by C<sub>3</sub>H<sub>5</sub> cluster ion implantations,JSAP Annual Meetings Extended Abstracts,2436-7613,The Japan Society of Applied Physics,2015-08-31,2015.2,0,3283-3283,https://cir.nii.ac.jp/crid/1390577298349613440,https://doi.org/10.11470/jsapmeeting.2015.2.0_3283