200 kV Atomic Resolution Analytical Electron Microscope Equipped with a Monochromator

DOI 15 References

Bibliographic Information

Other Title
  • モノクロメータ付き200 kV原子分解能分析電子顕微鏡

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Description

<p>To measure a fine electronic structure in EELS for a specimen at high spatial and energy resolutions, we have developed a new analytical electron microscope equipped with a monochromator, which incorporates a double Wien-filter system. The electron probe was resulted to be highly monochromated and roundly shaped on the specimen plane. The ultimate energy resolutions, measured in FWHMs, for zero-loss peaks were measured to be 36 meV at 200 kV and 30 meV at 60 kV with 0.1 seconds acquisitions. In the experiment of EELS mapping, the map showed an atomic resolution and the spectrum showed an energy resolution of 146 meV.</p>

Journal

  • KENBIKYO

    KENBIKYO 48 (2), 128-132, 2013-08-30

    The Japanese Society of Microscopy

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Details 詳細情報について

  • CRID
    1390845702278288896
  • NII Article ID
    10031194759
  • NII Book ID
    AA11917781
  • DOI
    10.11410/kenbikyo.48.2_128
  • ISSN
    24342386
    13490958
  • Text Lang
    ja
  • Data Source
    • JaLC
    • CiNii Articles
  • Abstract License Flag
    Disallowed

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