Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
ESASHI Masayoshi,Revolution of sensors in micro electro mechanical systems (MEMS),Oyo Buturi,03698009,The Japan Society of Applied Physics,2011-03-10,80,3,181-188,https://cir.nii.ac.jp/crid/1390845702287431680,https://doi.org/10.11470/oubutsu.80.3_181