Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Yan Haixia and Bao Jinyan and Yu Quan and Dong Linxi,Inclination Effects on Voltage-controlled Tuning of MEMS Disk Resonator Array Composite Fabricated by Deep Reactive Ion Etching Process,Sensors and Materials,0914-4935,MYU K.K.,2018-11-30,30,11,2747,https://cir.nii.ac.jp/crid/1390845713025427712,https://doi.org/10.18494/sam.2018.1972