Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) MURAKAMI Kenichi and HAYAKAWA Tomohiko and Jerome Pitogo DE LEON and ISHIKAWA Masatoshi,Shape Sensing Method for Micro Fabricated Objects based on Real-time High-speed Motion Blur Compensation Method using Galvanometer Mirror,The Proceedings of the Symposium on Micro-Nano Science and Technology,2432-9495,The Japan Society of Mechanical Engineers,2018,2018.9,0,01pm1PN153,https://cir.nii.ac.jp/crid/1390845713070070144,https://doi.org/10.1299/jsmemnm.2018.9.01pm1pn153