Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
OGAWA Shuichi and YOSHIGOE Akitaka and TAKAKUWA Yuji,Simultaneous Observation of Si Oxidation Rate and Oxidation-induced Strain Using XPS,Vacuum and Surface Science,24335835,The Japan Society of Vacuum and Surface Science,2019-06-10,62,6,350-355,https://cir.nii.ac.jp/crid/1390845713076155008,https://doi.org/10.1380/vss.62.350