書誌事項
- タイトル別名
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- タングステン CMP ニ オケル スラリー ノ サイセイ ニ カンスル キソテキ ケンキュウ
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説明
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Chemical Mechanical Polishing (CMP) is essential for the manufacturing of recent high-performance electronic device. However, for the CMP process, huge amount of slurry is used, which is to be disposed after being used only once. From the viewpoint of reduction of environmental burdens, this study was made for exploring the possibility of recycling of slurry by focusing on the slurry used for Tungsten CMP. For that purpose, we collected the slurry used for polishing and then tried to reuse it for polishing again. As a method for evaluation, we made comparisons of removal rates between new slurry and recovered slurry. The results shows that when collecting the slurry during CMP, it contained the water remained on the surface of the polishing pad after conditioning, by which slurry was diluted and caused the reduction of removal rate of Tungsten film. However, it was found that when making polishing of Tungsten film using the slurry recovered without being diluted with water, the same level of removal rate as new slurry is obtained.
収録刊行物
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- 埼玉大学地域共同研究センター紀要 = Report of Cooperative Research Center, Saitama University
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埼玉大学地域共同研究センター紀要 = Report of Cooperative Research Center, Saitama University 6 20-23, 2006
埼玉大学総合研究機構地域共同研究センター産学連携推進部門
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詳細情報 詳細情報について
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- CRID
- 1390853649743936256
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- NII論文ID
- 120006388549
- 40015615886
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- NII書誌ID
- AA11808968
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- NDL書誌ID
- 8924797
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- ISSN
- 13474758
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- IRDB
- NDL
- CiNii Articles