著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Idris A. S. and Jiang H. and 浜本 貴一,DRY ETCHING OF GERMANIUM WAVEGUIDES BY USING CHF_3 INDUCTIVELY COUPLED PLASMA,Proceedings of International Exchange and Innovation Conference on Engineering & Sciences (IEICES),2434-1436,九州大学大学院総合理工学府,2015-10-15,1,,1,https://cir.nii.ac.jp/crid/1390853649777299328,https://doi.org/10.15017/1809224