Mg recoil implantation into GaN with incident Nitrogen ion(5)
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- Yamada Toshikazu
- AIST GaN-OIL
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- Yamada Hisashi
- AIST GaN-OIL
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- Takahashi Tokio
- AIST ESPRIT
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- Shimizu Mituaki
- AIST GaN-OIL
Bibliographic Information
- Other Title
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- GaN中への窒素によるMgのリコイルインプランテーションの試み(5)
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2020.1 (0), 2827-2827, 2020-02-28
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390855190120893952
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC