Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Shen Xu-Qiang and Kojima Kazutoshi,High quality semipolar (10-13) AlN hetero-epitaxial growth by ammonia-free high-temperature MOVPE (AFHT-MOVPE),JSAP Annual Meetings Extended Abstracts,2436-7613,The Japan Society of Applied Physics,2021-02-26,2021.1,0,2586-2586,https://cir.nii.ac.jp/crid/1390855422518990720,https://doi.org/10.11470/jsapmeeting.2021.1.0_2586