{"@context":{"@vocab":"https://cir.nii.ac.jp/schema/1.0/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/","foaf":"http://xmlns.com/foaf/0.1/","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","datacite":"https://schema.datacite.org/meta/kernel-4/","ndl":"http://ndl.go.jp/dcndl/terms/","jpcoar":"https://github.com/JPCOAR/schema/blob/master/2.0/"},"@id":"https://cir.nii.ac.jp/crid/1390856384292263808.json","@type":"Article","productIdentifier":[{"identifier":{"@type":"DOI","@value":"10.11470/jsapmeeting.2018.2.0_3460"}}],"dc:title":[{"@language":"en","@value":"Dissociation and Association Behavior of Hydrogen in Carbon Cluster Implanted Region during Device Fabrication Process"},{"@language":"ja","@value":"デバイス工程中の炭素クラスター注入領域の水素吸着脱離挙動解析"}],"dc:language":"ja","creator":[{"@id":"https://cir.nii.ac.jp/crid/1410856384292263936","@type":"Researcher","foaf:name":[{"@language":"en","@value":"Okuyama Ryosuke"},{"@language":"ja","@value":"奥山 亮輔"}],"jpcoar:affiliationName":[{"@language":"ja","@value":"SUMCO"},{"@language":"en","@value":"SUMCO"}]},{"@id":"https://cir.nii.ac.jp/crid/1410856384292263809","@type":"Researcher","foaf:name":[{"@language":"en","@value":"Masada Ayumi"},{"@language":"ja","@value":"柾田 亜由美"}],"jpcoar:affiliationName":[{"@language":"ja","@value":"SUMCO"},{"@language":"en","@value":"SUMCO"}]},{"@id":"https://cir.nii.ac.jp/crid/1410856384292263808","@type":"Researcher","foaf:name":[{"@language":"en","@value":"Kobayashi Koji"},{"@language":"ja","@value":"小林 弘治"}],"jpcoar:affiliationName":[{"@language":"en","@value":"SUMCO"},{"@language":"ja","@value":"SUMCO"}]},{"@id":"https://cir.nii.ac.jp/crid/1410856384292263814","@type":"Researcher","foaf:name":[{"@language":"en","@value":"Shigematsu Satoshi"},{"@language":"ja","@value":"重松 理史"}],"jpcoar:affiliationName":[{"@language":"ja","@value":"SUMCO"},{"@language":"en","@value":"SUMCO"}]},{"@id":"https://cir.nii.ac.jp/crid/1410856384292263937","@type":"Researcher","foaf:name":[{"@language":"en","@value":"Hirose Ryo"},{"@language":"ja","@value":"廣瀬 諒"}],"jpcoar:affiliationName":[{"@language":"en","@value":"SUMCO"},{"@language":"ja","@value":"SUMCO"}]},{"@id":"https://cir.nii.ac.jp/crid/1410856384292263810","@type":"Researcher","foaf:name":[{"@language":"en","@value":"Kadono Takeshi"},{"@language":"ja","@value":"門野 武"}],"jpcoar:affiliationName":[{"@language":"en","@value":"SUMCO"},{"@language":"ja","@value":"SUMCO"}]},{"@id":"https://cir.nii.ac.jp/crid/1410856384292263811","@type":"Researcher","foaf:name":[{"@language":"en","@value":"Koga Yoshihiro"},{"@language":"ja","@value":"古賀 祥泰"}],"jpcoar:affiliationName":[{"@language":"en","@value":"SUMCO"},{"@language":"ja","@value":"SUMCO"}]},{"@id":"https://cir.nii.ac.jp/crid/1410856384292263813","@type":"Researcher","foaf:name":[{"@language":"en","@value":"Okuda Hidehiko"},{"@language":"ja","@value":"奥田 秀彦"}],"jpcoar:affiliationName":[{"@language":"ja","@value":"SUMCO"},{"@language":"en","@value":"SUMCO"}]},{"@id":"https://cir.nii.ac.jp/crid/1410856384292263812","@type":"Researcher","foaf:name":[{"@language":"en","@value":"Kurita Kazunari"},{"@language":"ja","@value":"栗田 一成"}],"jpcoar:affiliationName":[{"@language":"en","@value":"SUMCO"},{"@language":"ja","@value":"SUMCO"}]}],"publication":{"publicationIdentifier":[{"@type":"EISSN","@value":"24367613"}],"prism:publicationName":[{"@language":"en","@value":"JSAP Annual Meetings Extended Abstracts"},{"@language":"ja","@value":"応用物理学会学術講演会講演予稿集"}],"dc:publisher":[{"@language":"en","@value":"The Japan Society of Applied Physics"},{"@language":"ja","@value":"公益社団法人 応用物理学会"}],"prism:publicationDate":"2018-09-05","prism:volume":"2018.2","prism:number":"0","prism:startingPage":"3460","prism:endingPage":"3460"},"jpcoar:conferenceName":"応用物理学会秋季学術講演会","jpcoar:conferencePlace":"名古屋国際会議場","availableAt":"2018-09-05","foaf:topic":[{"@id":"https://cir.nii.ac.jp/all?q=19p-131-10","dc:title":"19p-131-10"},{"@id":"https://cir.nii.ac.jp/all?q=Hydrogen","dc:title":"Hydrogen"},{"@id":"https://cir.nii.ac.jp/all?q=carbon%20cluster","dc:title":"carbon cluster"},{"@id":"https://cir.nii.ac.jp/all?q=19p-131-10","dc:title":"19p-131-10"},{"@id":"https://cir.nii.ac.jp/all?q=%E7%B5%90%E6%99%B6%E5%B7%A5%E5%AD%A6","dc:title":"結晶工学"},{"@id":"https://cir.nii.ac.jp/all?q=%E7%B5%90%E6%99%B6%E8%A9%95%E4%BE%A1%EF%BC%8C%E4%B8%8D%E7%B4%94%E7%89%A9%E3%83%BB%E7%B5%90%E6%99%B6%E6%AC%A0%E9%99%A5","dc:title":"結晶評価，不純物・結晶欠陥"},{"@id":"https://cir.nii.ac.jp/all?q=%E4%B8%8D%E7%B4%94%E7%89%A9%E5%8A%B9%E6%9E%9C","dc:title":"不純物効果"},{"@id":"https://cir.nii.ac.jp/all?q=%E6%B0%B4%E7%B4%A0","dc:title":"水素"},{"@id":"https://cir.nii.ac.jp/all?q=%E7%82%AD%E7%B4%A0%E3%82%AF%E3%83%A9%E3%82%B9%E3%82%BF%E3%83%BC","dc:title":"炭素クラスター"}],"dataSourceIdentifier":[{"@type":"JALC","@value":"oai:japanlinkcenter.org:2009880732"}]}