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Dissociation and Association Behavior of Hydrogen in Carbon Cluster Implanted Region during Device Fabrication Process
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- Okuyama Ryosuke
- SUMCO
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- Masada Ayumi
- SUMCO
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- Kobayashi Koji
- SUMCO
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- Shigematsu Satoshi
- SUMCO
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- Hirose Ryo
- SUMCO
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- Kadono Takeshi
- SUMCO
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- Koga Yoshihiro
- SUMCO
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- Okuda Hidehiko
- SUMCO
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- Kurita Kazunari
- SUMCO
Bibliographic Information
- Other Title
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- デバイス工程中の炭素クラスター注入領域の水素吸着脱離挙動解析
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2018.2 (0), 3460-3460, 2018-09-05
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390856384292263808
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC