Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
KIKUCHI AKIOU and YAO AKIFUMI and MORI ISAMU and ONO TAKAHITO and SAMUKAWA SEIJI,Fabrication and evaluation of SiNP-SiGe<sub>0.3</sub> composite based on neutral beam etching technique,JSAP Annual Meetings Extended Abstracts,2436-7613,The Japan Society of Applied Physics,2016-09-01,2016.2,0,1816-1816,https://cir.nii.ac.jp/crid/1390858131657738368,https://doi.org/10.11470/jsapmeeting.2016.2.0_1816