著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Shiratani Masaharu and Ono Shinjiro and Eri Manato and Okumura Takamasa and Kamataki Kunihiro and Yamashita Naoto and Kiyama Haruki and Itagaki Naho and Koga Kazunori,Stress reduction of a-C:H films with inserting submonolayer of carbon nanoparticles,日本表面真空学会学術講演会要旨集,2434-8589,公益社団法人 日本表面真空学会,2023,2023,0,1Ga06,https://cir.nii.ac.jp/crid/1390861538038951552,https://doi.org/10.14886/jvss.2023.0_1ga06