著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Permpatdechakul Thitipat and Khajornrungruang Panart and Suzuki Keisuke and Blattler Aran and Inthiam Jiraphan,Experimental In-Situ Observatory on Brownian Motion Behavior of 105 nm Sized Silica Particles During Chemical Mechanical Polishing of 4H-SiC by an Evanescent Field,International Journal of Automation Technology,18817629,富士技術出版株式会社,2024-01-05,18,1,47-57,https://cir.nii.ac.jp/crid/1390861648443649024,https://doi.org/10.20965/ijat.2024.p0047