Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
ITO Kazuma and ARAI Hideo,"Model EV-X, Dry Vacuum Pump for Middle Harsh Process",Vacuum and Surface Science,2433-5835,The Japan Society of Vacuum and Surface Science,2024-04-10,67,4,169-171,https://cir.nii.ac.jp/crid/1390862710142398208,https://doi.org/10.1380/vss.67.169