{"@context":{"@vocab":"https://cir.nii.ac.jp/schema/1.0/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/","foaf":"http://xmlns.com/foaf/0.1/","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","datacite":"https://schema.datacite.org/meta/kernel-4/","ndl":"http://ndl.go.jp/dcndl/terms/","jpcoar":"https://github.com/JPCOAR/schema/blob/master/2.0/"},"@id":"https://cir.nii.ac.jp/crid/1410282679040408960.json","@type":"Researcher","personIdentifier":[{"@type":"NRID","@value":"9000021608016"}],"foaf:Person":[{"foaf:name":[{"@value":"真壁 保志"}]}],"career":[{"institution":{"notation":[{"@language":"en","@value":"Faculty of Engineering, Hokkaido University"},{"@language":"ja","@value":"北海道大学工学部"}]}}],"product":[{"@id":"https://cir.nii.ac.jp/crid/1390282679040408960","@type":"Article","productIdentifier":[{"@type":"DOI","@value":"10.3131/jvsj.34.204"},{"@type":"NDL_BIB_ID","@value":"3716735"},{"@type":"NDL_CALL_NUMBER","@value":"Z16-474"},{"@type":"URI","@value":"http://id.ndl.go.jp/bib/3716735"},{"@type":"URI","@value":"https://ndlsearch.ndl.go.jp/books/R000000004-I3716735"},{"@type":"NAID","@value":"130000868973"}],"notation":[{"@language":"en","@value":"Influence of power density micro-morphology of sputtered Mo films. Estimation by measurement of surface roughness factor."},{"@value":"Ｍｏスパッタ膜の微視的形態に及ぼす電力密度の影響　表面粗さ測定による評価"},{"@language":"ja-Kana","@value":"Mo スパッタ マク ノ ビシテキ ケイタイ ニ オヨボス デンリョク ミツド"}],"relation":[{"type":"creator"}]}],"dataSourceIdentifier":[{"@type":"JALC","@value":"oai:japanlinkcenter.org:0000922512_5KxsVPMLYCZrwnH4dZUvthDmxFK"},{"@type":"CIA","@value":"130000868973_NY0C0wto82fCTnxMuQS9vvGYnnW"},{"@type":"NDL_SEARCH","@value":"oai:ndlsearch.ndl.go.jp:R000000004-I3716735_NY0C0wto82fCTnxMuQS9vvGYnnW"},{"@type":"CROSSREF","@value":"10.3131/jvsj.34.204_4WN202G3k2PN33V9eIeyZVbBCJT"},{"@type":"OPENAIRE","@value":"doi_dedup___::f88fad2ca19c3859f3e206bec94650ee_ALVs5x2XFNBxBg8VJAwWACVnL7l"}]}