Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Ching-Lin Fan and Yi-Yan Lin and Shou-Kuan Wang,Performance Improvement of Low-Temperature Polycrystalline Silicon Thin-Film Transistors with Fluorinated Silicate Glass Drive-In Masking Layer,Japanese journal of applied physics : JJAP,00214922,Tokyo : The Japan Society of Applied Physics,2012-10,51,10,106502,https://cir.nii.ac.jp/crid/1520009407643201280,https://doi.org/10.7567/jjap.51.106502