著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Boon Teik Chan and Eddy Kunnen and Matthias Uhlig,Study of SF₆/N₂O Microwave Plasma for Surface Texturing of Multicrystalline (<150μm) Solar Substrates,Japanese journal of applied physics : JJAP,00214922,Tokyo : The Japan Society of Applied Physics,2012-10,51,10,,https://cir.nii.ac.jp/crid/1520009408472229120,