著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Chi-Hang Chin and Tseng-Fu Lu and Jer-Chyi Wang,Effects of CF4 plasma treatment on pH and pNa sensing properties of light-addressable potentiometric sensor with a 2-nm-thick sensitive HfO2 layer grown by atomic layer deposition,Japanese journal of applied physics : JJAP,00214922,Tokyo : The Japan Society of Applied Physics,2011-04,50,4,,https://cir.nii.ac.jp/crid/1520009408824686976,