Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Kiyoyuki Yambe and Akio Matsuoka and Yoshiomi Kondoh,Experimental Study on Favorable Properties of Compound RF Discharge Plasmas with a Tapered Shape Hollow Cathode Compared with a Plane Cathode,"Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP",00214922,Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics,2006-11,45,11,8883-8889,https://cir.nii.ac.jp/crid/1520009409318433920,https://doi.org/10.1143/jjap.45.8883