著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
F. C. Zumsteg and K. W. Leffew and A. E. Feiring,The Impact of Fluoropolymers on Line Edge Roughness in 193 nm Imaging,Journal of photopolymer science and technology,09149244,Chiba : The Society of Photopolymer Science and Technology,2005,18,4,467-469,https://cir.nii.ac.jp/crid/1520010380092978176,