{"@context":{"@vocab":"https://cir.nii.ac.jp/schema/1.0/","rdfs":"http://www.w3.org/2000/01/rdf-schema#","dc":"http://purl.org/dc/elements/1.1/","dcterms":"http://purl.org/dc/terms/","foaf":"http://xmlns.com/foaf/0.1/","prism":"http://prismstandard.org/namespaces/basic/2.0/","cinii":"http://ci.nii.ac.jp/ns/1.0/","datacite":"https://schema.datacite.org/meta/kernel-4/","ndl":"http://ndl.go.jp/dcndl/terms/","jpcoar":"https://github.com/JPCOAR/schema/blob/master/2.0/"},"@id":"https://cir.nii.ac.jp/crid/1520015487545838720.json","@type":"Article","productIdentifier":[{"identifier":{"@type":"NDL_BIB_ID","@value":"032949378"}},{"identifier":{"@type":"URI","@value":"http://id.ndl.go.jp/bib/032949378"}},{"identifier":{"@type":"URI","@value":"https://ndlsearch.ndl.go.jp/books/R000000004-I032949378"}}],"dc:title":[{"@value":"CMP工程後におけるPVAブラシ洗浄について"},{"@language":"ja-Kana","@value":"CMP コウテイ ゴ ニ オケル PVA ブラシ センジョウ ニ ツイテ"}],"dcterms:alternative":[{"@value":"CMP工程後におけるPVAブラシ洗浄について"},{"@value":"On the PVA brush scrubbing for the post-CMP cleaning"},{"@value":"特集 最新の洗浄技術 : 微小パーティクルの除去技術"},{"@language":"ja-Kana","@value":"トクシュウ サイシン ノ センジョウ ギジュツ : ビショウ パーティクル ノ ジョキョ ギジュツ"}],"dc:language":"ja","creator":[{"@id":"https://cir.nii.ac.jp/crid/1530015487545838721","@type":"Researcher","foaf:name":[{"@value":"真田 俊之"}]},{"@id":"https://cir.nii.ac.jp/crid/1530015487545838720","@type":"Researcher","foaf:name":[{"@value":"濵田 聡美"}]}],"publication":{"publicationIdentifier":[{"@type":"NDL_BIB_ID","@value":"000000054214"},{"@type":"ISSN","@value":"09142703"},{"@type":"LISSN","@value":"09142703"},{"@type":"NCID","@value":"AN10192823"}],"prism:publicationName":[{"@value":"Abrasive technology : 砥粒加工学会誌 : journal of the Japan Society for Abrasive Technology"}],"dc:publisher":[{"@value":"東京 : 砥粒加工学会"}],"prism:publicationDate":"2023-07","prism:volume":"67","prism:number":"7","prism:startingPage":"393","prism:endingPage":"396"},"url":[{"@id":"http://id.ndl.go.jp/bib/032949378"},{"@id":"https://ndlsearch.ndl.go.jp/books/R000000004-I032949378"}],"dataSourceIdentifier":[{"@type":"NDL_SEARCH","@value":"oai:ndlsearch.ndl.go.jp:R000000004-I032949378"}]}