著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Koichi Sudoh and Jun Nakamura and Muneyuki Naito,Formation of Silicon-on-Nothing Structures with Extremely Flat Surfaces,Japanese journal of applied physics : JJAP,00214922,Tokyo : The Japan Society of Applied Physics,2013-07,52,7,,https://cir.nii.ac.jp/crid/1520290882171087872,