著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI) Anri Nakajima and Shin-Ichiro Kuroki and Shuntaro Fujii,In-Plane Grain Orientation Alignment of Polycrystalline Silicon Films by Normal and Oblique-Angle Ion Implantations,Japanese journal of applied physics : JJAP,00214922,Tokyo : The Japan Society of Applied Physics,2012-04,51,4,,https://cir.nii.ac.jp/crid/1520290882239474688,