著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Valery Godyak and Chin-Wook Chung,Distributed Ferromagnetic Inductively Coupled Plasma as an Alternative Plasma Processing Tool,"Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP",00214922,Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics,2006-10,45,10B,8035-8041,https://cir.nii.ac.jp/crid/1520290882391520128,