著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Dae-Hyeong Kim and Hyun-Goo Kang and Sang-Kyun Kim,"Effect of Calcination Process on Synthesis of Ceria Particles, and Its Influence on Shallow Trench Isolation Chemical Mechanical Planarization Performance","Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP",00214922,Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics,2006-06,45,6A,4893-4897,https://cir.nii.ac.jp/crid/1520290882701535872,https://doi.org/10.1143/jjap.45.4893