著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Sang-Cheon Park and Sung-Won Youn and Hiroshi Hiroshima,Simplified Cu/Polyimide Damascene Approach Based on Imprint Process of Soluble Block Copolymer Polyimide,Japanese journal of applied physics : JJAP,00214922,Tokyo : The Japan Society of Applied Physics,2013-10,52,10,,https://cir.nii.ac.jp/crid/1520290882981433856,