著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Takanori Suda and Noriaki Toyoda and Ken-ichi Hara,Development of Cu Etching Using O₂ Cluster Ion Beam under Acetic Acid Gas Atmosphere,Japanese journal of applied physics : JJAP,00214922,Tokyo : The Japan Society of Applied Physics,2012-08,51,8,,https://cir.nii.ac.jp/crid/1520290883326418176,