著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Jinxing Liang and Fusao Kohsaka and Takahiro Matsuo,Development of highly integrated quartz micro-electro-mechanical system tilt sensor,Japanese journal of applied physics : JJAP,00214922,Tokyo : The Japan Society of Applied Physics,2009-06,48,6,,https://cir.nii.ac.jp/crid/1520290883332189056,