著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Masayoshi Esashi,COMPREHENSIVE REVIEW : Revolution of Sensors in Micro-Electromechanical Systems,Japanese journal of applied physics : JJAP,00214922,Tokyo : The Japan Society of Applied Physics,2012-08,51,8,080001,https://cir.nii.ac.jp/crid/1520290883812803328,https://doi.org/10.1143/jjap.51.080001