著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Retsuo Kawakami and Takeshi Inaoka and Kikuo Tominaga,Synergy effect of particle radiation and ultraviolet radiation from capacitively coupled radio frequency argon plasmas on n-GaN etching damage,Japanese journal of applied physics : JJAP,00214922,Tokyo : The Japan Society of Applied Physics,2008-08,47,8,6863-6866,https://cir.nii.ac.jp/crid/1520290883951543808,https://doi.org/10.1143/jjap.47.6863