Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Tatsuya Sakoda,Study on behavior of sputtered particles during surface discharges,Japanese journal of applied physics : JJAP,00214922,Tokyo : The Japan Society of Applied Physics,2009-10,48,10,106003,https://cir.nii.ac.jp/crid/1520572357118601472,https://doi.org/10.1143/jjap.48.106003