著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Daisuke Ohba and Chien-Hui Lai and Zeguo Tang,Surface chemistry of preferentially (111)- and (220)-crystal-oriented microcrystalline silicon films by radio-frequency plasma-enhanced chemical vapor deposition,Japanese journal of applied physics : JJAP,00214922,Tokyo : The Japan Society of Applied Physics,2010-08,49,8,,https://cir.nii.ac.jp/crid/1520572357187548032,