Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Wen-Ching Shih and Tzyy-Long Wang and Ming-Hsien Chu,Characteristics of ZnO thin film surface acoustic wave devices fabricated using Al2O3 films on silicon substrates,Japanese journal of applied physics : JJAP,00214922,Tokyo : The Japan Society of Applied Physics,2010-07,49,7,,https://cir.nii.ac.jp/crid/1520572357256831232,