著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Marianna Pantouvaki and Craig Huffman and Larry Zhao,Advanced organic polymer for the aggressive scaling of low-k materials,Japanese journal of applied physics : JJAP,00214922,Tokyo : The Japan Society of Applied Physics,2011-04,50,4,,https://cir.nii.ac.jp/crid/1520572357929233152,