著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Naoto Matsuo and Nobuya Isoda and Akira Heya,Influence of laser plasma soft X-ray irradiation on crystallization of a-Si film by infrared furnace annealing,"兵庫県立大学大学院工学研究科研究報告 = Reports of Graduate School of Engineering, University of Hyogo",1349855X,神戸 : 兵庫県立大学,2010,,63,29-32,https://cir.nii.ac.jp/crid/1520572358189728512,