著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Masatoshi Miyake and Ken'etsu Yokogawa,High-Temperature Annealing by Subatmospheric-Pressure Radio-Frequency Capacitively Coupled Plasma,Japanese journal of applied physics : JJAP,00214922,Tokyo : The Japan Society of Applied Physics,2012-08,51,8,,https://cir.nii.ac.jp/crid/1520572358338575104,