著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Kwang Mook Park and Myoung Bok Lee and Kyeong Su Jeon,Reactive Ion Etching Texturing for Multicrystalline Silicon Solar Cells Using a SF₆/O₂/Cl₂ Gas Mixture,Japanese journal of applied physics : JJAP,00214922,Tokyo : The Japan Society of Applied Physics,2013-03,52,3,,https://cir.nii.ac.jp/crid/1520572358460705920,