著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Hyun-Su Jun,Statistical Prediction of Micro-Arcing in Radio-Frequency Plasmas for Manufacture of Semiconductor Device,Japanese journal of applied physics : JJAP,00214922,Tokyo : The Japan Society of Applied Physics,2013-06,52,6,066202,https://cir.nii.ac.jp/crid/1520572358495015680,https://doi.org/10.7567/jjap.52.066202