著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Yoshinori Nakakubo and Asahiko Matsuda and Masanaga Fukasawa,Optical and electrical characterization of hydrogen-plasma-damaged silicon surface structures and its impact on in-line monitoring,Japanese journal of applied physics : JJAP,00214922,Tokyo : The Japan Society of Applied Physics,2010-08,49,8,,https://cir.nii.ac.jp/crid/1520572359039125504,