Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Michio Sato and Hiroto Ohtake and Seiji Samukawa,Reduction in number of sparks generated in high-density plasma process by fixing the wall potential,Japanese journal of applied physics : JJAP,00214922,Tokyo : The Japan Society of Applied Physics,2011-03,50,3,036204,https://cir.nii.ac.jp/crid/1520572359057335808,https://doi.org/10.7567/jjap.50.036204