著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Yukio Takigawa and Nobuaki Tarumi and Morio Shiohara,Novel air-gap formation technology using Ru barrier metal for Cu interconnects with high reliability and low capacitance,Japanese journal of applied physics : JJAP,00214922,Tokyo : The Japan Society of Applied Physics,2011-01,50,1,016503,https://cir.nii.ac.jp/crid/1520853832388253440,https://doi.org/10.7567/jjap.50.016503