著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Akira Uedono and Naoya Inoue and Yoshihiro Hayashi,Characterization of low-k/Cu damascene structures using monoenergetic positron beams,Japanese journal of applied physics : JJAP,00214922,Tokyo : The Japan Society of Applied Physics,2009-12,48,12,120222,https://cir.nii.ac.jp/crid/1520853832698640768,https://doi.org/10.1143/jjap.48.120222