Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI)
Hiroyuki Yoshiki,Localized etching of a polyimide film by an atmospheric-pressure radio frequency microplasma excited by a 100-μm-φ metal pipe electrode,Japanese journal of applied physics : JJAP,00214922,Tokyo : The Japan Society of Applied Physics,2010-08,49,8,,https://cir.nii.ac.jp/crid/1520853833009150464,