著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Tetsuo Tabei and Kazuhiko Maeda and Shin Yokoyama,Fabrication of Spin-Coated Optical Waveguides for Optically Interconnected LSI and Influence of Fabrication Process on Underlying Metal-Oxide-Semiconductor Capacitors,"Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP",00214922,Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics,2006-04,45,4B,3498-3503,https://cir.nii.ac.jp/crid/1520853833156258432,