著者名,論文名,雑誌名,ISSN,出版者名,出版日付,巻,号,ページ,URL,URL(DOI)
Seungchan Cho and Keunwoo Lee and Pungkeun Song,Barrier characteristics of ZrN films deposited by remote plasma-enhanced atomic layer deposition using tetrakis(diethylamino)zirconium precursor,"Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP",00214922,Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics,2007-07,46,7A,4085-4088,https://cir.nii.ac.jp/crid/1520853833243466240,https://doi.org/10.1143/jjap.46.4085