Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Katsuhiro Yokota and Takahiro Nakatani and Fumiyoshi Miyashita,Annealing of hydrogenated diamond-like carbon films deposited on ground electrode of plasma enhanced chemical vapor deposition system,"Japanese journal of applied physics. Part. 1, Regular papers, brief communications & review papers : JJAP",00214922,Tokyo : Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physics,2007-09,46,9A,5901-5907,https://cir.nii.ac.jp/crid/1520853833625252864,https://doi.org/10.1143/jjap.46.5901