Author,Title,Journal,ISSN,Publisher,Date,Volume,Number,Page,URL,URL(DOI) Shinjiro Kuroda and Naoya Suzuki and Hiroshi Tanigawa,Variable Resonance Frequency Selection for Fishbone-Shaped Microelectromechanical System Resonator Based on Multi-Physics Simulation,Japanese journal of applied physics : JJAP,00214922,Tokyo : The Japan Society of Applied Physics,2013-06,52,6,,https://cir.nii.ac.jp/crid/1520853833975355904,